Product Description
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Technical Specifications
| Model NO. | Porous Ceramic Vacuum Chuck Table |
| Application | Dicing Chucks Cleaning Chucks Printing Chucks |
| Power | Mechanical Transmission |
| Structure | Solid |
| Material | Alumina / Silicon Cabide Porous Ceramic |
| Type | Ceramic Plates |
| Acid Resistance | Mg/Cm2 ≤10 |
| Porosity | 40% |
| Processing Service | Punching, Decoiling, Moulding |
| Density | 2.3-2.5 G /Cm3 |
| Compressive Strength | ≥600 |
| Pore Size | 30μm |
| Working Pressure | MPa ≤10 |
| Hardness (Hra) | Hra ≥50 |
| Alkali Resistance | Mg/Cm2 ≤20 |
| Flexure Strength | MPa ≥40 |
| Transport Package | Customized |
| Specification | Customized |
| Trademark | INNOVACERA |
| Origin | Fujian, China |